Screw Vacuum Pumps - COBRA DS 180/1000/2000 ...

Screw Vacuum Pumps - COBRA DS 180/1000/2000

Supplier: Busch Australia

The COBRA single-stage screw vacuum pump range takes advantage of the dry screw pump technology to maximize product uptime.

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Principle of operation

The advanced design allows for fewer moving parts, longer up-time between service, and lower nitrogen consumption than conventional multistage compression vacuum pumps.

The screw mechanism minimizes sliding areas inside the pump and thus has optimum restart capabilities. The innovative screw design results in a lower energy consumption as compared to standard screw designs. Using the indirect cooling principle the whole pump body is working at an uniform temperature level.

There are no cold spots, and thus condensation is reduced to a minimum. The COBRA series line is ideally suited for all harsh processes, that are found in the semiconductor industry of today and tomorrow.

High reliability

Due to the well proven twin screw design and the intelligent temperature management COBRA screw pumps are highly reliable even in the harshest applications in semiconductor processes and related applications. This results in a high life expectancy.

Low cost of ownership

Long MTBF (Mean Time Between Failure) and preventive maintenance free operation are the main reasons for a low cost of ownership. Low utility consumption and the high reliability are responsible for lower production cost in the semiconductor industry. Improved serviceability A smaller number of parts with rotors made from one piece and the modular design result in lower costs for overhauls.

Tunable pump performance

The tunable pumping speed of the COBRA screw vacuum pumps allows for a exible adaptation to changing process conditions. COBRA vacuum pumps can be used as pressure control element and will save energy by running always at the optimum pumping speed. The flexible programming of this feature allows for easy tool integration.

Advanced pump monitoring

COBRA vacuum pumps are well prepared for advanced monitoring, either at the pump directly or by the central monitoring system (CMS). With the latest version of the CMS vacuum pumps as well as abatement systems, vacuum valves and pipe heaters can be monitored.

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